Two masks process for high aspect ratio inertial sensors with ajustable range

Proceedings of the International Semiconductor Conference, CAS

Saved in:

Bibliographic Details
Main Authors:	Iliescu, C., Avram, M., Miao, J., Tay, F.E.H., Xu, G.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73986
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-73986
record_format	dspace
spelling	sg-nus-scholar.10635-739862015-02-11T01:50:59Z Two masks process for high aspect ratio inertial sensors with ajustable range Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G. MECHANICAL ENGINEERING Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range Proceedings of the International Semiconductor Conference, CAS 1 263-266 2014-06-19T05:41:45Z 2014-06-19T05:41:45Z 2004 Conference Paper Iliescu, C.,Avram, M.,Miao, J.,Tay, F.E.H.,Xu, G. (2004). Two masks process for high aspect ratio inertial sensors with ajustable range. Proceedings of the International Semiconductor Conference, CAS 1 : 263-266. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/73986 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range
spellingShingle	Anodic bonding Comb drive High aspect ratio Inertial sensors with adjustable range Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G. Two masks process for high aspect ratio inertial sensors with ajustable range
description	Proceedings of the International Semiconductor Conference, CAS
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G.
format	Conference or Workshop Item
author	Iliescu, C. Avram, M. Miao, J. Tay, F.E.H. Xu, G.
author_sort	Iliescu, C.
title	Two masks process for high aspect ratio inertial sensors with ajustable range
title_short	Two masks process for high aspect ratio inertial sensors with ajustable range
title_full	Two masks process for high aspect ratio inertial sensors with ajustable range
title_fullStr	Two masks process for high aspect ratio inertial sensors with ajustable range
title_full_unstemmed	Two masks process for high aspect ratio inertial sensors with ajustable range
title_sort	two masks process for high aspect ratio inertial sensors with ajustable range
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73986
_version_	1681087847535214592

Two masks process for high aspect ratio inertial sensors with ajustable range

Similar Items