Wet etching of glass

10.1109/SMICND.2005.1558704

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Bibliographic Details
Main Authors:	Iliescu, C., Tay, F.E.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Glass Masking layers Wet etching
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/74018
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-74018
record_format	dspace
spelling	sg-nus-scholar.10635-740182024-11-12T19:00:25Z Wet etching of glass Iliescu, C. Tay, F.E.H. MECHANICAL ENGINEERING Glass Masking layers Wet etching 10.1109/SMICND.2005.1558704 Proceedings of the International Semiconductor Conference, CAS 1 35-44 2014-06-19T05:42:07Z 2014-06-19T05:42:07Z 2005 Conference Paper Iliescu, C., Tay, F.E.H. (2005). Wet etching of glass. Proceedings of the International Semiconductor Conference, CAS 1 : 35-44. ScholarBank@NUS Repository. https://doi.org/10.1109/SMICND.2005.1558704 0780392140 http://scholarbank.nus.edu.sg/handle/10635/74018 000237180300005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Glass Masking layers Wet etching
spellingShingle	Glass Masking layers Wet etching Iliescu, C. Tay, F.E.H. Wet etching of glass
description	10.1109/SMICND.2005.1558704
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Iliescu, C. Tay, F.E.H.
format	Conference or Workshop Item
author	Iliescu, C. Tay, F.E.H.
author_sort	Iliescu, C.
title	Wet etching of glass
title_short	Wet etching of glass
title_full	Wet etching of glass
title_fullStr	Wet etching of glass
title_full_unstemmed	Wet etching of glass
title_sort	wet etching of glass
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/74018
_version_	1821220258759835648

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