Modeling of the optical torsion micromirror

Modeling of the optical torsion micromirror

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Zhang, X.M., Chau, F.S., Quan, C., Liu, A.Q.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/75040
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Institution: National University of Singapore
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Summary:Proceedings of SPIE - The International Society for Optical Engineering

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