Modeling of the optical torsion micromirror

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors:	Zhang, X.M., Chau, F.S., Quan, C., Liu, A.Q.
Other Authors:	MECHANICAL & PRODUCTION ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/75040
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-75040
record_format	dspace
spelling	sg-nus-scholar.10635-750402024-11-14T17:55:17Z Modeling of the optical torsion micromirror Zhang, X.M. Chau, F.S. Quan, C. Liu, A.Q. MECHANICAL & PRODUCTION ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3899 109-116 PSISD 2014-06-19T09:10:14Z 2014-06-19T09:10:14Z 1999 Conference Paper Zhang, X.M., Chau, F.S., Quan, C., Liu, A.Q. (1999). Modeling of the optical torsion micromirror. Proceedings of SPIE - The International Society for Optical Engineering 3899 : 109-116. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/75040 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Proceedings of SPIE - The International Society for Optical Engineering
author2	MECHANICAL & PRODUCTION ENGINEERING
author_facet	MECHANICAL & PRODUCTION ENGINEERING Zhang, X.M. Chau, F.S. Quan, C. Liu, A.Q.
format	Conference or Workshop Item
author	Zhang, X.M. Chau, F.S. Quan, C. Liu, A.Q.
spellingShingle	Zhang, X.M. Chau, F.S. Quan, C. Liu, A.Q. Modeling of the optical torsion micromirror
author_sort	Zhang, X.M.
title	Modeling of the optical torsion micromirror
title_short	Modeling of the optical torsion micromirror
title_full	Modeling of the optical torsion micromirror
title_fullStr	Modeling of the optical torsion micromirror
title_full_unstemmed	Modeling of the optical torsion micromirror
title_sort	modeling of the optical torsion micromirror
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/75040
_version_	1821200816548085760

Modeling of the optical torsion micromirror

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