Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc

• Main Authors: Lin, T.-Y., Liao, Z.-J., Tsai, J., Chua, D., Peng, J.-L., Liu, C.-L., Mo, C.-N.
• Other Authors: MATERIALS SCIENCE AND ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/75226
• Institution: National University of Singapore

2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009