Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc

2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009

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Bibliographic Details
Main Authors:	Lin, T.-Y., Liao, Z.-J., Tsai, J., Chua, D., Peng, J.-L., Liu, C.-L., Mo, C.-N.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/75226
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-75226
record_format	dspace
spelling	sg-nus-scholar.10635-752262024-11-10T21:30:07Z Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc Lin, T.-Y. Liao, Z.-J. Tsai, J. Chua, D. Peng, J.-L. Liu, C.-L. Mo, C.-N. MATERIALS SCIENCE AND ENGINEERING 2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009 - 2014-06-19T09:33:55Z 2014-06-19T09:33:55Z 2009 Conference Paper Lin, T.-Y.,Liao, Z.-J.,Tsai, J.,Chua, D.,Peng, J.-L.,Liu, C.-L.,Mo, C.-N. (2009). Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc. 2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009 : -. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/75226 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Lin, T.-Y. Liao, Z.-J. Tsai, J. Chua, D. Peng, J.-L. Liu, C.-L. Mo, C.-N.
format	Conference or Workshop Item
author	Lin, T.-Y. Liao, Z.-J. Tsai, J. Chua, D. Peng, J.-L. Liu, C.-L. Mo, C.-N.
spellingShingle	Lin, T.-Y. Liao, Z.-J. Tsai, J. Chua, D. Peng, J.-L. Liu, C.-L. Mo, C.-N. Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
author_sort	Lin, T.-Y.
title	Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
title_short	Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
title_full	Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
title_fullStr	Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
title_full_unstemmed	Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
title_sort	fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/75226
_version_	1821189721731104768

Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc

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