Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc

• Main Authors: Lin, T.-Y., Liao, Z.-J., Tsai, J., Chua, D., Peng, J.-L., Liu, C.-L., Mo, C.-N.
• 其他作者: MATERIALS SCIENCE AND ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/75226
• 機構: National University of Singapore

2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009