Footing reduction in the organic bottom anti-reflective coating implementation

Footing reduction in the organic bottom anti-reflective coating implementation

Proceedings of SPIE - The International Society for Optical Engineering

Saved in:
Bibliographic Details
Main Authors: Ko, T.-M., Cheng, A.
Other Authors: CHEMICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Computer simulation
Descrum
Footing
Organic barc
Photoresist
Planarization
Reflectivity
Resist profile
Sidewall angle
Swing curve
Online Access:http://scholarbank.nus.edu.sg/handle/10635/75284
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:Proceedings of SPIE - The International Society for Optical Engineering

Similar Items