Footing reduction in the organic bottom anti-reflective coating implementation
Proceedings of SPIE - The International Society for Optical Engineering
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sg-nus-scholar.10635-752842023-08-29T22:28:37Z Footing reduction in the organic bottom anti-reflective coating implementation Ko, T.-M. Cheng, A. CHEMICAL ENGINEERING Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve Proceedings of SPIE - The International Society for Optical Engineering 3183 196-206 PSISD 2014-06-19T09:49:25Z 2014-06-19T09:49:25Z 1997 Conference Paper Ko, T.-M., Cheng, A. (1997). Footing reduction in the organic bottom anti-reflective coating implementation. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 196-206. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/75284 A1997BJ57L00021 Scopus |
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Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve |
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Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve Ko, T.-M. Cheng, A. Footing reduction in the organic bottom anti-reflective coating implementation |
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Proceedings of SPIE - The International Society for Optical Engineering |
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CHEMICAL ENGINEERING |
author_facet |
CHEMICAL ENGINEERING Ko, T.-M. Cheng, A. |
format |
Conference or Workshop Item |
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Ko, T.-M. Cheng, A. |
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Ko, T.-M. |
title |
Footing reduction in the organic bottom anti-reflective coating implementation |
title_short |
Footing reduction in the organic bottom anti-reflective coating implementation |
title_full |
Footing reduction in the organic bottom anti-reflective coating implementation |
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Footing reduction in the organic bottom anti-reflective coating implementation |
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Footing reduction in the organic bottom anti-reflective coating implementation |
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footing reduction in the organic bottom anti-reflective coating implementation |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/75284 |
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