Footing reduction in the organic bottom anti-reflective coating implementation

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Ko, T.-M., Cheng, A.
Other Authors: CHEMICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/75284
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-752842023-08-29T22:28:37Z Footing reduction in the organic bottom anti-reflective coating implementation Ko, T.-M. Cheng, A. CHEMICAL ENGINEERING Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve Proceedings of SPIE - The International Society for Optical Engineering 3183 196-206 PSISD 2014-06-19T09:49:25Z 2014-06-19T09:49:25Z 1997 Conference Paper Ko, T.-M., Cheng, A. (1997). Footing reduction in the organic bottom anti-reflective coating implementation. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 196-206. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/75284 A1997BJ57L00021 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Computer simulation
Descrum
Footing
Organic barc
Photoresist
Planarization
Reflectivity
Resist profile
Sidewall angle
Swing curve
spellingShingle Computer simulation
Descrum
Footing
Organic barc
Photoresist
Planarization
Reflectivity
Resist profile
Sidewall angle
Swing curve
Ko, T.-M.
Cheng, A.
Footing reduction in the organic bottom anti-reflective coating implementation
description Proceedings of SPIE - The International Society for Optical Engineering
author2 CHEMICAL ENGINEERING
author_facet CHEMICAL ENGINEERING
Ko, T.-M.
Cheng, A.
format Conference or Workshop Item
author Ko, T.-M.
Cheng, A.
author_sort Ko, T.-M.
title Footing reduction in the organic bottom anti-reflective coating implementation
title_short Footing reduction in the organic bottom anti-reflective coating implementation
title_full Footing reduction in the organic bottom anti-reflective coating implementation
title_fullStr Footing reduction in the organic bottom anti-reflective coating implementation
title_full_unstemmed Footing reduction in the organic bottom anti-reflective coating implementation
title_sort footing reduction in the organic bottom anti-reflective coating implementation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/75284
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