Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process

10.1117/12.324025

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Bibliographic Details
Main Authors:	Loong, S.Y., Lee, H.K., Zhou, M.S., Chan, L.H., Premachandran, V.
Other Authors:	CHEMISTRY
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Capillary Electrophoresis Chlorine Corrosion Failure Metal etching
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/77412
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-77412
record_format	dspace
spelling	sg-nus-scholar.10635-774122023-10-31T07:41:38Z Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process Loong, S.Y. Lee, H.K. Zhou, M.S. Chan, L.H. Premachandran, V. CHEMISTRY Capillary Electrophoresis Chlorine Corrosion Failure Metal etching 10.1117/12.324025 Proceedings of SPIE - The International Society for Optical Engineering 3508 170-180 PSISD 2014-06-23T05:54:43Z 2014-06-23T05:54:43Z 1998 Conference Paper Loong, S.Y., Lee, H.K., Zhou, M.S., Chan, L.H., Premachandran, V. (1998). Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process. Proceedings of SPIE - The International Society for Optical Engineering 3508 : 170-180. ScholarBank@NUS Repository. https://doi.org/10.1117/12.324025 0277786X http://scholarbank.nus.edu.sg/handle/10635/77412 000077158000020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Capillary Electrophoresis Chlorine Corrosion Failure Metal etching
spellingShingle	Capillary Electrophoresis Chlorine Corrosion Failure Metal etching Loong, S.Y. Lee, H.K. Zhou, M.S. Chan, L.H. Premachandran, V. Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
description	10.1117/12.324025
author2	CHEMISTRY
author_facet	CHEMISTRY Loong, S.Y. Lee, H.K. Zhou, M.S. Chan, L.H. Premachandran, V.
format	Conference or Workshop Item
author	Loong, S.Y. Lee, H.K. Zhou, M.S. Chan, L.H. Premachandran, V.
author_sort	Loong, S.Y.
title	Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
title_short	Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
title_full	Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
title_fullStr	Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
title_full_unstemmed	Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
title_sort	characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/77412
_version_	1781783768188583936

Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process

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