Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process

10.1117/12.324025

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Bibliographic Details
Main Authors: Loong, S.Y., Lee, H.K., Zhou, M.S., Chan, L.H., Premachandran, V.
Other Authors: CHEMISTRY
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/77412
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Institution: National University of Singapore

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