Optimal geometry for GeSi/Si super-lattice structure RBS investigation

• Main Authors: Wielunski, L.S., Osipowicz, T., Teo, E.J., Watt, F., Tok, E.S., Zhang, J.
• 其他作者: PHYSICS
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Channeling; Depth resolution; GeSi/Si super-lattice; Glancing angle detection; He RBS; Muliple scattering
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/77474

10.1016/S0168-583X(01)01218-6