Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation

Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation

10.1016/S0168-583X(01)01276-9

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Bibliographic Details
Main Authors: Bettiol, A.A., Rajta, I., Teo, E.J., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electron emission
Proton beam micromachining
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/77480
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Institution: National University of Singapore
Description
Summary:10.1016/S0168-583X(01)01276-9

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