Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation
10.1016/S0168-583X(01)01276-9
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2014
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sg-nus-scholar.10635-774802023-10-31T07:41:20Z Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation Bettiol, A.A. Rajta, I. Teo, E.J. Van Kan, J.A. Watt, F. PHYSICS CHEMISTRY Electron emission Proton beam micromachining SU-8 10.1016/S0168-583X(01)01276-9 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 1-4 154-159 NIMBE 2014-06-23T05:55:36Z 2014-06-23T05:55:36Z 2002-05 Conference Paper Bettiol, A.A., Rajta, I., Teo, E.J., Van Kan, J.A., Watt, F. (2002-05). Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 (1-4) : 154-159. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)01276-9 0168583X http://scholarbank.nus.edu.sg/handle/10635/77480 000176108800029 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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Electron emission Proton beam micromachining SU-8 |
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Electron emission Proton beam micromachining SU-8 Bettiol, A.A. Rajta, I. Teo, E.J. Van Kan, J.A. Watt, F. Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation |
| description |
10.1016/S0168-583X(01)01276-9 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Bettiol, A.A. Rajta, I. Teo, E.J. Van Kan, J.A. Watt, F. |
| format |
Conference or Workshop Item |
| author |
Bettiol, A.A. Rajta, I. Teo, E.J. Van Kan, J.A. Watt, F. |
| author_sort |
Bettiol, A.A. |
| title |
Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation |
| title_short |
Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation |
| title_full |
Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation |
| title_fullStr |
Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation |
| title_full_unstemmed |
Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation |
| title_sort |
proton beam micromachining: electron emission from su-8 resist during ion beam irradiation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/77480 |
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1781783775417466880 |