Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature

Japanese Journal of Applied Physics, Part 2: Letters

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Bibliographic Details
Main Authors:	Ren, Zhong-Min, Lu, Yong-Feng, Goh, Yeow-Whatt, Chong, Tow-Chong, Ng, Mei-Ling, Wang, Jian-Ping, Cheong, Boon-Aik, Liew, Yun-Fook
Other Authors:	DATA STORAGE INSTITUTE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80348
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80348
record_format	dspace
spelling	sg-nus-scholar.10635-803482015-01-09T06:11:00Z Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature Ren, Zhong-Min Lu, Yong-Feng Goh, Yeow-Whatt Chong, Tow-Chong Ng, Mei-Ling Wang, Jian-Ping Cheong, Boon-Aik Liew, Yun-Fook DATA STORAGE INSTITUTE ELECTRICAL ENGINEERING ELECTRICAL & COMPUTER ENGINEERING Japanese Journal of Applied Physics, Part 2: Letters 39 5 A L423-L425 JAPLD 2014-10-07T02:56:33Z 2014-10-07T02:56:33Z 2000 Article Ren, Zhong-Min,Lu, Yong-Feng,Goh, Yeow-Whatt,Chong, Tow-Chong,Ng, Mei-Ling,Wang, Jian-Ping,Cheong, Boon-Aik,Liew, Yun-Fook (2000). Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature. Japanese Journal of Applied Physics, Part 2: Letters 39 (5 A) : L423-L425. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80348 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Japanese Journal of Applied Physics, Part 2: Letters
author2	DATA STORAGE INSTITUTE
author_facet	DATA STORAGE INSTITUTE Ren, Zhong-Min Lu, Yong-Feng Goh, Yeow-Whatt Chong, Tow-Chong Ng, Mei-Ling Wang, Jian-Ping Cheong, Boon-Aik Liew, Yun-Fook
format	Article
author	Ren, Zhong-Min Lu, Yong-Feng Goh, Yeow-Whatt Chong, Tow-Chong Ng, Mei-Ling Wang, Jian-Ping Cheong, Boon-Aik Liew, Yun-Fook
spellingShingle	Ren, Zhong-Min Lu, Yong-Feng Goh, Yeow-Whatt Chong, Tow-Chong Ng, Mei-Ling Wang, Jian-Ping Cheong, Boon-Aik Liew, Yun-Fook Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
author_sort	Ren, Zhong-Min
title	Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
title_short	Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
title_full	Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
title_fullStr	Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
title_full_unstemmed	Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
title_sort	deposition of aln thin films with cubic crystal structures on silicon substrates at room temperature
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80348
_version_	1681088870912884736

Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature

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