Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature

Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature

Japanese Journal of Applied Physics, Part 2: Letters

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Bibliographic Details
Main Authors: Ren, Zhong-Min, Lu, Yong-Feng, Goh, Yeow-Whatt, Chong, Tow-Chong, Ng, Mei-Ling, Wang, Jian-Ping, Cheong, Boon-Aik, Liew, Yun-Fook
Other Authors: DATA STORAGE INSTITUTE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80348
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Institution: National University of Singapore
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