Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system
10.1063/1.359844
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sg-nus-scholar.10635-803682024-11-09T04:03:56Z Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system Choi, W.K. Chan, Y.M. Ah, L.K. Loh, F.C. Tan, K.L. Ramam, A. ELECTRICAL ENGINEERING PHYSICS 10.1063/1.359844 Journal of Applied Physics 78 7 4390-4394 2014-10-07T02:56:46Z 2014-10-07T02:56:46Z 1995 Article Choi, W.K., Chan, Y.M., Ah, L.K., Loh, F.C., Tan, K.L., Ramam, A. (1995). Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system. Journal of Applied Physics 78 (7) : 4390-4394. ScholarBank@NUS Repository. https://doi.org/10.1063/1.359844 00218979 http://scholarbank.nus.edu.sg/handle/10635/80368 A1995RW89200012 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1063/1.359844 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Chan, Y.M. Ah, L.K. Loh, F.C. Tan, K.L. Ramam, A. |
| format |
Article |
| author |
Choi, W.K. Chan, Y.M. Ah, L.K. Loh, F.C. Tan, K.L. Ramam, A. |
| spellingShingle |
Choi, W.K. Chan, Y.M. Ah, L.K. Loh, F.C. Tan, K.L. Ramam, A. Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| author_sort |
Choi, W.K. |
| title |
Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| title_short |
Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| title_full |
Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| title_fullStr |
Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| title_full_unstemmed |
Effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| title_sort |
effect of rapid thermal annealing on the structural and electrical properties of a silicon-silicon oxide system |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80368 |
| _version_ |
1821215403367464960 |