Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films
10.1016/S0921-5107(99)00486-9
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sg-nus-scholar.10635-803792023-10-30T07:58:25Z Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films Choi, W.K. Chong, N.B. Tan, L.S. Han, L.J. ELECTRICAL ENGINEERING 10.1016/S0921-5107(99)00486-9 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 72 2 132-134 MSBTE 2014-10-07T02:56:53Z 2014-10-07T02:56:53Z 2000-03-15 Article Choi, W.K., Chong, N.B., Tan, L.S., Han, L.J. (2000-03-15). Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 72 (2) : 132-134. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(99)00486-9 09215107 http://scholarbank.nus.edu.sg/handle/10635/80379 000086130900015 Scopus |
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Singapore Singapore |
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| description |
10.1016/S0921-5107(99)00486-9 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Chong, N.B. Tan, L.S. Han, L.J. |
| format |
Article |
| author |
Choi, W.K. Chong, N.B. Tan, L.S. Han, L.J. |
| spellingShingle |
Choi, W.K. Chong, N.B. Tan, L.S. Han, L.J. Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| author_sort |
Choi, W.K. |
| title |
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| title_short |
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| title_full |
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| title_fullStr |
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| title_full_unstemmed |
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| title_sort |
effects of rf power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80379 |
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1781783903008194560 |