Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films
Journal of Applied Physics
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80388 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-80388 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-803882024-11-09T00:15:45Z Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films Choi, W.K. Han, L.J. Loo, F.L. ELECTRICAL ENGINEERING Journal of Applied Physics 81 1 276-280 JAPIA 2014-10-07T02:56:59Z 2014-10-07T02:56:59Z 1997-01-01 Article Choi, W.K.,Han, L.J.,Loo, F.L. (1997-01-01). Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films. Journal of Applied Physics 81 (1) : 276-280. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80388 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Journal of Applied Physics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Han, L.J. Loo, F.L. |
| format |
Article |
| author |
Choi, W.K. Han, L.J. Loo, F.L. |
| spellingShingle |
Choi, W.K. Han, L.J. Loo, F.L. Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| author_sort |
Choi, W.K. |
| title |
Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_short |
Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_full |
Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_fullStr |
Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_full_unstemmed |
Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_sort |
electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80388 |
| _version_ |
1821193940172275712 |