Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films

Journal of Applied Physics

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Bibliographic Details
Main Authors: Choi, W.K., Han, L.J., Loo, F.L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80388
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Institution: National University of Singapore

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