Electrical properties of rapid thermal oxides on Si1-x-yGexCy films

Applied Physics Letters

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Bibliographic Details
Main Authors: Bera, L.K., Choi, W.K., Feng, W., Yang, C.Y., Mi, J.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80390
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Institution: National University of Singapore
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Summary:Applied Physics Letters