Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films

Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films

10.1016/S1369-8001(02)00037-9

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Bibliographic Details
Main Authors: Feng, W., Choi, W.K., Bera, L.K., Ji, M., Yang, C.Y.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Pseudo-dielectric functions
Refractive indices
Si1-x-yGexCy
Spectroscopy ellipsometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84045
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/84045

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