Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films

• Main Authors: Feng, W., Choi, W.K., Bera, L.K., Ji, M., Yang, C.Y.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Pseudo-dielectric functions; Refractive indices; Si1-x-yGexCy; Spectroscopy ellipsometry
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84045
• Institution: National University of Singapore

10.1016/S1369-8001(02)00037-9