Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films

10.1016/S1369-8001(02)00037-9

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Bibliographic Details
Main Authors:	Feng, W., Choi, W.K., Bera, L.K., Ji, M., Yang, C.Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Pseudo-dielectric functions Refractive indices Si1-x-yGexCy Spectroscopy ellipsometry
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84045
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84045
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spelling	sg-nus-scholar.10635-840452023-10-29T23:29:59Z Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films Feng, W. Choi, W.K. Bera, L.K. Ji, M. Yang, C.Y. ELECTRICAL & COMPUTER ENGINEERING Pseudo-dielectric functions Refractive indices Si1-x-yGexCy Spectroscopy ellipsometry 10.1016/S1369-8001(02)00037-9 Materials Science in Semiconductor Processing 4 6 655-659 2014-10-07T04:48:10Z 2014-10-07T04:48:10Z 2001-12 Conference Paper Feng, W., Choi, W.K., Bera, L.K., Ji, M., Yang, C.Y. (2001-12). Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films. Materials Science in Semiconductor Processing 4 (6) : 655-659. ScholarBank@NUS Repository. https://doi.org/10.1016/S1369-8001(02)00037-9 13698001 http://scholarbank.nus.edu.sg/handle/10635/84045 000175066200037 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Pseudo-dielectric functions Refractive indices Si1-x-yGexCy Spectroscopy ellipsometry
spellingShingle	Pseudo-dielectric functions Refractive indices Si1-x-yGexCy Spectroscopy ellipsometry Feng, W. Choi, W.K. Bera, L.K. Ji, M. Yang, C.Y. Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films
description	10.1016/S1369-8001(02)00037-9
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Feng, W. Choi, W.K. Bera, L.K. Ji, M. Yang, C.Y.
format	Conference or Workshop Item
author	Feng, W. Choi, W.K. Bera, L.K. Ji, M. Yang, C.Y.
author_sort	Feng, W.
title	Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films
title_short	Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films
title_full	Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films
title_fullStr	Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films
title_full_unstemmed	Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films
title_sort	optical characterization of as-prepared and rapid thermal oxidized partially strain compensated si1-x-y gexcy films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84045
_version_	1781784415880347648

Optical characterization of as-prepared and rapid thermal oxidized partially strain compensated Si1-x-y GexCy films

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