Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films

Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films

Ph.D

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Bibliographic Details
Main Author: FENG WEI
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Si1xyGexCy, substitutional C, strain, pile-up, precipitate, and defect
Online Access:http://scholarbank.nus.edu.sg/handle/10635/13475
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/13475

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