Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films

Ph.D

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Main Author:	FENG WEI
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Si1ï€xï€yGexCy, substitutional C, strain, pile-up, precipitate, and defect
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13475
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Institution:	National University of Singapore
Language:	English

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spelling	sg-nus-scholar.10635-134752024-10-26T01:26:54Z Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films FENG WEI ELECTRICAL & COMPUTER ENGINEERING CHOI WEE KIONG Si1ï€xï€yGexCy, substitutional C, strain, pile-up, precipitate, and defect Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:33:21Z 2010-04-08T10:33:21Z 2003-12-17 Thesis FENG WEI (2003-12-17). Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13475 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Si1ï€xï€yGexCy, substitutional C, strain, pile-up, precipitate, and defect
spellingShingle	Si1ï€xï€yGexCy, substitutional C, strain, pile-up, precipitate, and defect FENG WEI Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING FENG WEI
format	Theses and Dissertations
author	FENG WEI
author_sort	FENG WEI
title	Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
title_short	Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
title_full	Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
title_fullStr	Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
title_full_unstemmed	Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
title_sort	structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13475
_version_	1821181812043415552

Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films

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