Electrical properties of rapid thermal oxides on Si1-x-yGexCy films

Applied Physics Letters

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Main Authors:	Bera, L.K., Choi, W.K., Feng, W., Yang, C.Y., Mi, J.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80390
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-803902015-02-02T11:24:05Z Electrical properties of rapid thermal oxides on Si1-x-yGexCy films Bera, L.K. Choi, W.K. Feng, W. Yang, C.Y. Mi, J. ELECTRICAL ENGINEERING Applied Physics Letters 77 2 256-258 APPLA 2014-10-07T02:57:01Z 2014-10-07T02:57:01Z 2000-07-10 Article Bera, L.K.,Choi, W.K.,Feng, W.,Yang, C.Y.,Mi, J. (2000-07-10). Electrical properties of rapid thermal oxides on Si1-x-yGexCy films. Applied Physics Letters 77 (2) : 256-258. ScholarBank@NUS Repository. 00036951 http://scholarbank.nus.edu.sg/handle/10635/80390 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Applied Physics Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Bera, L.K. Choi, W.K. Feng, W. Yang, C.Y. Mi, J.
format	Article
author	Bera, L.K. Choi, W.K. Feng, W. Yang, C.Y. Mi, J.
spellingShingle	Bera, L.K. Choi, W.K. Feng, W. Yang, C.Y. Mi, J. Electrical properties of rapid thermal oxides on Si1-x-yGexCy films
author_sort	Bera, L.K.
title	Electrical properties of rapid thermal oxides on Si1-x-yGexCy films
title_short	Electrical properties of rapid thermal oxides on Si1-x-yGexCy films
title_full	Electrical properties of rapid thermal oxides on Si1-x-yGexCy films
title_fullStr	Electrical properties of rapid thermal oxides on Si1-x-yGexCy films
title_full_unstemmed	Electrical properties of rapid thermal oxides on Si1-x-yGexCy films
title_sort	electrical properties of rapid thermal oxides on si1-x-ygexcy films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80390
_version_	1681088878703804416

Electrical properties of rapid thermal oxides on Si1-x-yGexCy films

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