Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization

Applied Surface Science

Saved in:
Bibliographic Details
Main Authors: Hong, M.H., Lu, Y.F., Ho, T.M., Lu, L.W., Low, T.S.
Other Authors: DATA STORAGE INSTITUTE
Format: Article
Published: 2014
Subjects:
ICCD imaging
Plasma dynamics
Pulsed laser deposition
Titanium plasma
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80414
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-80414
record_format dspace
spelling sg-nus-scholar.10635-804142015-01-13T23:02:21Z Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization Hong, M.H. Lu, Y.F. Ho, T.M. Lu, L.W. Low, T.S. DATA STORAGE INSTITUTE ELECTRICAL ENGINEERING ICCD imaging Plasma dynamics Pulsed laser deposition Titanium plasma Applied Surface Science 138-139 1-4 489-493 ASUSE 2014-10-07T02:57:16Z 2014-10-07T02:57:16Z 1999-01 Article Hong, M.H.,Lu, Y.F.,Ho, T.M.,Lu, L.W.,Low, T.S. (1999-01). Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization. Applied Surface Science 138-139 (1-4) : 489-493. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/80414 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic ICCD imaging
Plasma dynamics
Pulsed laser deposition
Titanium plasma
spellingShingle ICCD imaging
Plasma dynamics
Pulsed laser deposition
Titanium plasma
Hong, M.H.
Lu, Y.F.
Ho, T.M.
Lu, L.W.
Low, T.S.
Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization
description Applied Surface Science
author2 DATA STORAGE INSTITUTE
author_facet DATA STORAGE INSTITUTE
Hong, M.H.
Lu, Y.F.
Ho, T.M.
Lu, L.W.
Low, T.S.
format Article
author Hong, M.H.
Lu, Y.F.
Ho, T.M.
Lu, L.W.
Low, T.S.
author_sort Hong, M.H.
title Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization
title_short Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization
title_full Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization
title_fullStr Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization
title_full_unstemmed Fast ICCD imaging of KrF excimer laser induced titanium plasma plumes for silicon metallization
title_sort fast iccd imaging of krf excimer laser induced titanium plasma plumes for silicon metallization
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80414
_version_ 1681088883150815232

Similar Items