Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films

Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films

Journal of Applied Physics

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Main Authors: Choi, W.K., Ong, T.Y., Tan, L.S., Loh, F.C., Tan, K.L.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80600
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-806002015-02-08T02:49:51Z Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films Choi, W.K. Ong, T.Y. Tan, L.S. Loh, F.C. Tan, K.L. PHYSICS ELECTRICAL ENGINEERING Journal of Applied Physics 83 9 4968-4973 JAPIA 2014-10-07T02:59:17Z 2014-10-07T02:59:17Z 1998-05-01 Article Choi, W.K.,Ong, T.Y.,Tan, L.S.,Loh, F.C.,Tan, K.L. (1998-05-01). Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films. Journal of Applied Physics 83 (9) : 4968-4973. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80600 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Journal of Applied Physics
author2 PHYSICS
author_facet PHYSICS
Choi, W.K.
Ong, T.Y.
Tan, L.S.
Loh, F.C.
Tan, K.L.
format Article
author Choi, W.K.
Ong, T.Y.
Tan, L.S.
Loh, F.C.
Tan, K.L.
spellingShingle Choi, W.K.
Ong, T.Y.
Tan, L.S.
Loh, F.C.
Tan, K.L.
Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
author_sort Choi, W.K.
title Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
title_short Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
title_full Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
title_fullStr Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
title_full_unstemmed Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
title_sort infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80600
_version_ 1681088917759066112

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