Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films

Journal of Applied Physics

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Bibliographic Details
Main Authors: Choi, W.K., Ong, T.Y., Tan, L.S., Loh, F.C., Tan, K.L.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80600
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Institution: National University of Singapore

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