Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
Journal of Applied Physics
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Main Authors: | Choi, W.K., Ong, T.Y., Tan, L.S., Loh, F.C., Tan, K.L. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80600 |
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Institution: | National University of Singapore |
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