Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films

Thin Solid Films

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Bibliographic Details
Main Authors:	Han, L.J., Ong, T.Y., Prakash, S., Chua, L.G., Choi, W.K., Tan, L.S., Loh, F.C., Tan, K.L.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Amorphous silicon carbide Annealing FTIR Sputtering X-ray photoelectron spectroscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80604
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80604
record_format	dspace
spelling	sg-nus-scholar.10635-806042015-01-08T17:53:24Z Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films Han, L.J. Ong, T.Y. Prakash, S. Chua, L.G. Choi, W.K. Tan, L.S. Loh, F.C. Tan, K.L. ELECTRICAL ENGINEERING PHYSICS Amorphous silicon carbide Annealing FTIR Sputtering X-ray photoelectron spectroscopy Thin Solid Films 343-344 1-2 441-444 THSFA 2014-10-07T02:59:20Z 2014-10-07T02:59:20Z 1999 Article Han, L.J.,Ong, T.Y.,Prakash, S.,Chua, L.G.,Choi, W.K.,Tan, L.S.,Loh, F.C.,Tan, K.L. (1999). Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films. Thin Solid Films 343-344 (1-2) : 441-444. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/80604 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Amorphous silicon carbide Annealing FTIR Sputtering X-ray photoelectron spectroscopy
spellingShingle	Amorphous silicon carbide Annealing FTIR Sputtering X-ray photoelectron spectroscopy Han, L.J. Ong, T.Y. Prakash, S. Chua, L.G. Choi, W.K. Tan, L.S. Loh, F.C. Tan, K.L. Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
description	Thin Solid Films
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Han, L.J. Ong, T.Y. Prakash, S. Chua, L.G. Choi, W.K. Tan, L.S. Loh, F.C. Tan, K.L.
format	Article
author	Han, L.J. Ong, T.Y. Prakash, S. Chua, L.G. Choi, W.K. Tan, L.S. Loh, F.C. Tan, K.L.
author_sort	Han, L.J.
title	Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
title_short	Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
title_full	Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
title_fullStr	Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
title_full_unstemmed	Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
title_sort	infra-red, x-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80604
_version_	1681088918528720896

Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films

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