Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Saved in:
| Main Authors: | , , |
|---|---|
| 其他作者: | |
| 格式: | Article |
| 出版: |
2014
|
| 主題: | |
| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/80845 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| id |
sg-nus-scholar.10635-80845 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-808452024-11-14T10:20:36Z Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide Wee, T.-S. Lu, Y.-F. Chim, W.-K. ELECTRICAL ENGINEERING Carbon tetrachloride Diffused reflection Gallium arsenide Heat conduction analysis Laser etched profile Laser induced temperature profile Numerical laser etching model Pyrolytic laser etching Silicon Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 36 8 5116-5124 JAPND 2014-10-07T03:01:55Z 2014-10-07T03:01:55Z 1997-08 Article Wee, T.-S.,Lu, Y.-F.,Chim, W.-K. (1997-08). Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 36 (8) : 5116-5124. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80845 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Carbon tetrachloride Diffused reflection Gallium arsenide Heat conduction analysis Laser etched profile Laser induced temperature profile Numerical laser etching model Pyrolytic laser etching Silicon |
| spellingShingle |
Carbon tetrachloride Diffused reflection Gallium arsenide Heat conduction analysis Laser etched profile Laser induced temperature profile Numerical laser etching model Pyrolytic laser etching Silicon Wee, T.-S. Lu, Y.-F. Chim, W.-K. Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| description |
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Wee, T.-S. Lu, Y.-F. Chim, W.-K. |
| format |
Article |
| author |
Wee, T.-S. Lu, Y.-F. Chim, W.-K. |
| author_sort |
Wee, T.-S. |
| title |
Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| title_short |
Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| title_full |
Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| title_fullStr |
Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| title_full_unstemmed |
Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| title_sort |
numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80845 |
| _version_ |
1821185172247150592 |