Photoresist patterning and ion implantation degradation effects on flash memory device yield

10.1149/1.1391143

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Main Authors:	Cha, C.L., Ngo, Q., Chor, E.F., See, A.K., Lee, T.J.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80980
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-809802015-01-16T16:52:11Z Photoresist patterning and ion implantation degradation effects on flash memory device yield Cha, C.L. Ngo, Q. Chor, E.F. See, A.K. Lee, T.J. ELECTRICAL ENGINEERING 10.1149/1.1391143 Electrochemical and Solid-State Letters 3 7 340-342 ESLEF 2014-10-07T03:03:21Z 2014-10-07T03:03:21Z 2000-07 Article Cha, C.L.,Ngo, Q.,Chor, E.F.,See, A.K.,Lee, T.J. (2000-07). Photoresist patterning and ion implantation degradation effects on flash memory device yield. Electrochemical and Solid-State Letters 3 (7) : 340-342. ScholarBank@NUS Repository. <a href="https://doi.org/10.1149/1.1391143" target="_blank">https://doi.org/10.1149/1.1391143</a> 10990062 http://scholarbank.nus.edu.sg/handle/10635/80980 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1149/1.1391143
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Cha, C.L. Ngo, Q. Chor, E.F. See, A.K. Lee, T.J.
format	Article
author	Cha, C.L. Ngo, Q. Chor, E.F. See, A.K. Lee, T.J.
spellingShingle	Cha, C.L. Ngo, Q. Chor, E.F. See, A.K. Lee, T.J. Photoresist patterning and ion implantation degradation effects on flash memory device yield
author_sort	Cha, C.L.
title	Photoresist patterning and ion implantation degradation effects on flash memory device yield
title_short	Photoresist patterning and ion implantation degradation effects on flash memory device yield
title_full	Photoresist patterning and ion implantation degradation effects on flash memory device yield
title_fullStr	Photoresist patterning and ion implantation degradation effects on flash memory device yield
title_full_unstemmed	Photoresist patterning and ion implantation degradation effects on flash memory device yield
title_sort	photoresist patterning and ion implantation degradation effects on flash memory device yield
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80980
_version_	1681088987742076928

Photoresist patterning and ion implantation degradation effects on flash memory device yield

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