Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films
10.1063/1.360377
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sg-nus-scholar.10635-812232023-10-25T22:43:12Z Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films Choi, W.K. Loo, F.L. Ling, C.H. Loh, F.C. Tan, K.L. PHYSICS ELECTRICAL ENGINEERING 10.1063/1.360377 Journal of Applied Physics 78 12 7289-7294 2014-10-07T03:05:58Z 2014-10-07T03:05:58Z 1995 Article Choi, W.K., Loo, F.L., Ling, C.H., Loh, F.C., Tan, K.L. (1995). Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films. Journal of Applied Physics 78 (12) : 7289-7294. ScholarBank@NUS Repository. https://doi.org/10.1063/1.360377 00218979 http://scholarbank.nus.edu.sg/handle/10635/81223 A1995TK56200062 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1063/1.360377 |
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PHYSICS |
| author_facet |
PHYSICS Choi, W.K. Loo, F.L. Ling, C.H. Loh, F.C. Tan, K.L. |
| format |
Article |
| author |
Choi, W.K. Loo, F.L. Ling, C.H. Loh, F.C. Tan, K.L. |
| spellingShingle |
Choi, W.K. Loo, F.L. Ling, C.H. Loh, F.C. Tan, K.L. Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| author_sort |
Choi, W.K. |
| title |
Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_short |
Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_full |
Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_fullStr |
Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_full_unstemmed |
Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| title_sort |
structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81223 |
| _version_ |
1781783977035563008 |