The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates
10.1063/1.351381
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sg-nus-scholar.10635-812562023-10-27T07:34:52Z The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates Lau, W.S. ELECTRICAL ENGINEERING 10.1063/1.351381 Journal of Applied Physics 71 1 489-493 2014-10-07T03:06:22Z 2014-10-07T03:06:22Z 1992 Article Lau, W.S. (1992). The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates. Journal of Applied Physics 71 (1) : 489-493. ScholarBank@NUS Repository. https://doi.org/10.1063/1.351381 00218979 http://scholarbank.nus.edu.sg/handle/10635/81256 A1992GX65500079 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.351381 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lau, W.S. |
| format |
Article |
| author |
Lau, W.S. |
| spellingShingle |
Lau, W.S. The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| author_sort |
Lau, W.S. |
| title |
The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| title_short |
The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| title_full |
The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| title_fullStr |
The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| title_full_unstemmed |
The preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| title_sort |
preparation and characterization of nearly hysteresis-free metal-nitride-silicon capacitors on both p- and n-type silicon substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81256 |
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1781783979609817088 |