Etching of GaN using Inductively Coupled Plasma

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors:	Ramam, A., Chua, S.J.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81412
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81412
record_format	dspace
spelling	sg-nus-scholar.10635-814122015-01-14T00:47:26Z Etching of GaN using Inductively Coupled Plasma Ramam, A. Chua, S.J. ELECTRICAL ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3975 I/- PSISD 2014-10-07T03:08:02Z 2014-10-07T03:08:02Z 2000 Conference Paper Ramam, A.,Chua, S.J. (2000). Etching of GaN using Inductively Coupled Plasma. Proceedings of SPIE - The International Society for Optical Engineering 3975 : I/-. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/81412 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of SPIE - The International Society for Optical Engineering
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ramam, A. Chua, S.J.
format	Conference or Workshop Item
author	Ramam, A. Chua, S.J.
spellingShingle	Ramam, A. Chua, S.J. Etching of GaN using Inductively Coupled Plasma
author_sort	Ramam, A.
title	Etching of GaN using Inductively Coupled Plasma
title_short	Etching of GaN using Inductively Coupled Plasma
title_full	Etching of GaN using Inductively Coupled Plasma
title_fullStr	Etching of GaN using Inductively Coupled Plasma
title_full_unstemmed	Etching of GaN using Inductively Coupled Plasma
title_sort	etching of gan using inductively coupled plasma
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81412
_version_	1681089066563534848

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