Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates

Materials Science in Semiconductor Processing

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Bibliographic Details
Main Authors: Feng, Z.C., Yang, T.R., Hou, Y.T.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
GaN
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81486
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-814862023-08-10T08:32:28Z Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates Feng, Z.C. Yang, T.R. Hou, Y.T. ELECTRICAL ENGINEERING GaN Infrared reflectance Non-destructive Sapphire Silicon Materials Science in Semiconductor Processing 4 6 571-576 2014-10-07T03:08:49Z 2014-10-07T03:08:49Z 2001-12 Conference Paper Feng, Z.C., Yang, T.R., Hou, Y.T. (2001-12). Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates. Materials Science in Semiconductor Processing 4 (6) : 571-576. ScholarBank@NUS Repository. 13698001 http://scholarbank.nus.edu.sg/handle/10635/81486 000175066200020 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic GaN
Infrared reflectance
Non-destructive
Sapphire
Silicon
spellingShingle GaN
Infrared reflectance
Non-destructive
Sapphire
Silicon
Feng, Z.C.
Yang, T.R.
Hou, Y.T.
Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates
description Materials Science in Semiconductor Processing
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Feng, Z.C.
Yang, T.R.
Hou, Y.T.
format Conference or Workshop Item
author Feng, Z.C.
Yang, T.R.
Hou, Y.T.
author_sort Feng, Z.C.
title Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates
title_short Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates
title_full Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates
title_fullStr Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates
title_full_unstemmed Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates
title_sort infrared reflectance analysis of gan epitaxial layers grown on sapphire and silicon substrates
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81486
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