Integrated (automated) photon emission microscope and MOSFET characterization system for combined microscopic and macroscopic device analysis

Integrated (automated) photon emission microscope and MOSFET characterization system for combined microscopic and macroscopic device analysis

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors: Ng, T.H., Chim, W.K., Chan, D.S.H., Phang, J.C.H., Liu, Y.Y., Lou, C.L., Leang, S.E., Tao, J.M.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81491
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/81491

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