Integrated (automated) photon emission microscope and MOSFET characterization system for combined microscopic and macroscopic device analysis
Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
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| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81491 |
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| Institution: | National University of Singapore |