Laser-controlled etching of (Al,Ga)As epitaxial layers
Materials Research Society Symposium - Proceedings
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81519 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-81519 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-815192015-01-09T09:27:33Z Laser-controlled etching of (Al,Ga)As epitaxial layers Chong, T.C. Lu, Y.F. Lee, A. ELECTRICAL ENGINEERING Materials Research Society Symposium - Proceedings 397 491-496 MRSPD 2014-10-07T03:09:10Z 2014-10-07T03:09:10Z 1996 Conference Paper Chong, T.C.,Lu, Y.F.,Lee, A. (1996). Laser-controlled etching of (Al,Ga)As epitaxial layers. Materials Research Society Symposium - Proceedings 397 : 491-496. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/81519 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Chong, T.C. Lu, Y.F. Lee, A. |
| format |
Conference or Workshop Item |
| author |
Chong, T.C. Lu, Y.F. Lee, A. |
| spellingShingle |
Chong, T.C. Lu, Y.F. Lee, A. Laser-controlled etching of (Al,Ga)As epitaxial layers |
| author_sort |
Chong, T.C. |
| title |
Laser-controlled etching of (Al,Ga)As epitaxial layers |
| title_short |
Laser-controlled etching of (Al,Ga)As epitaxial layers |
| title_full |
Laser-controlled etching of (Al,Ga)As epitaxial layers |
| title_fullStr |
Laser-controlled etching of (Al,Ga)As epitaxial layers |
| title_full_unstemmed |
Laser-controlled etching of (Al,Ga)As epitaxial layers |
| title_sort |
laser-controlled etching of (al,ga)as epitaxial layers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81519 |
| _version_ |
1681089086112137216 |