Laser-controlled etching of (Al,Ga)As epitaxial layers
Materials Research Society Symposium - Proceedings
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Main Authors: | Chong, T.C., Lu, Y.F., Lee, A. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81519 |
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Institution: | National University of Singapore |
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