Laser-controlled etching of (Al,Ga)As epitaxial layers

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Chong, T.C., Lu, Y.F., Lee, A.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81519
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Institution: National University of Singapore

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