New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

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Main Authors:	Lau, Wai Shing, Qian, Peng Wei, Zhao, Rong
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81589
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81589
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spelling	sg-nus-scholar.10635-815892015-01-09T15:42:15Z New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts Lau, Wai Shing Qian, Peng Wei Zhao, Rong ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA 207-212 234 2014-10-07T03:09:54Z 2014-10-07T03:09:54Z 1997 Conference Paper Lau, Wai Shing,Qian, Peng Wei,Zhao, Rong (1997). New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts. Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA : 207-212. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81589 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lau, Wai Shing Qian, Peng Wei Zhao, Rong
format	Conference or Workshop Item
author	Lau, Wai Shing Qian, Peng Wei Zhao, Rong
spellingShingle	Lau, Wai Shing Qian, Peng Wei Zhao, Rong New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts
author_sort	Lau, Wai Shing
title	New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts
title_short	New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts
title_full	New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts
title_fullStr	New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts
title_full_unstemmed	New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts
title_sort	new mechanism of leakage current in ultra-shallow junctions with tisi2 contacts
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81589
_version_	1681089098769498112

New mechanism of leakage current in ultra-shallow junctions with TiSi2 contacts

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