Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
IECON Proceedings (Industrial Electronics Conference)
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2014
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sg-nus-scholar.10635-816462015-03-31T04:35:39Z Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks Ho, Weng Khuen Tay, Arthur Schaper, Charles D. ELECTRICAL ENGINEERING IECON Proceedings (Industrial Electronics Conference) 1 17-22 IEPRE 2014-10-07T03:10:31Z 2014-10-07T03:10:31Z 1999 Conference Paper Ho, Weng Khuen,Tay, Arthur,Schaper, Charles D. (1999). Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks. IECON Proceedings (Industrial Electronics Conference) 1 : 17-22. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81646 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
IECON Proceedings (Industrial Electronics Conference) |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Ho, Weng Khuen Tay, Arthur Schaper, Charles D. |
| format |
Conference or Workshop Item |
| author |
Ho, Weng Khuen Tay, Arthur Schaper, Charles D. |
| spellingShingle |
Ho, Weng Khuen Tay, Arthur Schaper, Charles D. Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| author_sort |
Ho, Weng Khuen |
| title |
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| title_short |
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| title_full |
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| title_fullStr |
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| title_full_unstemmed |
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| title_sort |
optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81646 |
| _version_ |
1681089109129428992 |