Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks

10.1016/j.microrel.2010.07.005

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Main Authors: Samanta, P., Zhu, C., Chan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82075
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-820752023-10-29T23:36:20Z Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks Samanta, P. Zhu, C. Chan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1016/j.microrel.2010.07.005 Microelectronics Reliability 50 12 1907-1914 MCRLA 2014-10-07T04:25:05Z 2014-10-07T04:25:05Z 2010-12 Article Samanta, P., Zhu, C., Chan, M. (2010-12). Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks. Microelectronics Reliability 50 (12) : 1907-1914. ScholarBank@NUS Repository. https://doi.org/10.1016/j.microrel.2010.07.005 00262714 http://scholarbank.nus.edu.sg/handle/10635/82075 000285667300001 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1016/j.microrel.2010.07.005
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Samanta, P.
Zhu, C.
Chan, M.
format Article
author Samanta, P.
Zhu, C.
Chan, M.
spellingShingle Samanta, P.
Zhu, C.
Chan, M.
Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks
author_sort Samanta, P.
title Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks
title_short Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks
title_full Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks
title_fullStr Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks
title_full_unstemmed Comparison of electrical stress-induced charge carrier generation/trapping and related degradation of SiO2 and HfO2/SiO2 gate dielectric stacks
title_sort comparison of electrical stress-induced charge carrier generation/trapping and related degradation of sio2 and hfo2/sio2 gate dielectric stacks
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82075
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