Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2

10.1016/j.tsf.2004.05.030

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Bibliographic Details
Main Authors:	Yeo, C.C., Joo, M.S., Cho, B.J., Whang, S.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Crystallization Si out-diffusion
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82189
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Institution:	National University of Singapore

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record_format	dspace
spelling	sg-nus-scholar.10635-821892023-10-25T23:19:02Z Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2 Yeo, C.C. Joo, M.S. Cho, B.J. Whang, S.J. ELECTRICAL & COMPUTER ENGINEERING Crystallization Si out-diffusion 10.1016/j.tsf.2004.05.030 Thin Solid Films 462-463 SPEC. ISS. 90-95 THSFA 2014-10-07T04:26:26Z 2014-10-07T04:26:26Z 2004-09 Article Yeo, C.C., Joo, M.S., Cho, B.J., Whang, S.J. (2004-09). Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2. Thin Solid Films 462-463 (SPEC. ISS.) : 90-95. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.030 00406090 http://scholarbank.nus.edu.sg/handle/10635/82189 000223812800020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Crystallization Si out-diffusion
spellingShingle	Crystallization Si out-diffusion Yeo, C.C. Joo, M.S. Cho, B.J. Whang, S.J. Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
description	10.1016/j.tsf.2004.05.030
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yeo, C.C. Joo, M.S. Cho, B.J. Whang, S.J.
format	Article
author	Yeo, C.C. Joo, M.S. Cho, B.J. Whang, S.J.
author_sort	Yeo, C.C.
title	Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
title_short	Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
title_full	Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
title_fullStr	Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
title_full_unstemmed	Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
title_sort	effect of annealing on the composition and structure of hfo2 and nitrogen-incorporated hfo2
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82189
_version_	1781784076919767040

Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2

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