Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
10.1016/j.tsf.2004.05.030
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Main Authors: | Yeo, C.C., Joo, M.S., Cho, B.J., Whang, S.J. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82189 |
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Institution: | National University of Singapore |
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