Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device

10.1063/1.1767597

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Bibliographic Details
Main Authors:	Wang, Y.Q., Chen, J.H., Yoo, W.J., Yeo, Y.-C., Kim, S.J., Gupta, R., Tan, Z.Y.L., Kwong, D.-L., Du, A.Y., Balasubramanian, N.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82374
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82374
record_format	dspace
spelling	sg-nus-scholar.10635-823742023-10-30T22:31:59Z Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Kim, S.J. Gupta, R. Tan, Z.Y.L. Kwong, D.-L. Du, A.Y. Balasubramanian, N. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1767597 Applied Physics Letters 84 26 5407-5409 APPLA 2014-10-07T04:28:36Z 2014-10-07T04:28:36Z 2004-06-28 Article Wang, Y.Q., Chen, J.H., Yoo, W.J., Yeo, Y.-C., Kim, S.J., Gupta, R., Tan, Z.Y.L., Kwong, D.-L., Du, A.Y., Balasubramanian, N. (2004-06-28). Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device. Applied Physics Letters 84 (26) : 5407-5409. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1767597 00036951 http://scholarbank.nus.edu.sg/handle/10635/82374 000222200600037 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1767597
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Kim, S.J. Gupta, R. Tan, Z.Y.L. Kwong, D.-L. Du, A.Y. Balasubramanian, N.
format	Article
author	Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Kim, S.J. Gupta, R. Tan, Z.Y.L. Kwong, D.-L. Du, A.Y. Balasubramanian, N.
spellingShingle	Wang, Y.Q. Chen, J.H. Yoo, W.J. Yeo, Y.-C. Kim, S.J. Gupta, R. Tan, Z.Y.L. Kwong, D.-L. Du, A.Y. Balasubramanian, N. Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device
author_sort	Wang, Y.Q.
title	Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device
title_short	Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device
title_full	Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device
title_fullStr	Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device
title_full_unstemmed	Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device
title_sort	formation of ge nanocrystals in hfalo high-k dielectric and application in memory device
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82374
_version_	1781784121605881856

Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device

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