High-density MIM capacitors using AlTaOx dielectrics

10.1109/LED.2003.812572

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Bibliographic Details
Main Authors:	Yang, M.Y., Huang, C.H., Chin, A., Zhu, C., Li, M.F., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Capacitor Dielectric constant Frequency dependence High κ MIM RF
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82459
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Institution:	National University of Singapore

Description
Summary:	10.1109/LED.2003.812572

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