High-density MIM capacitors using AlTaOx dielectrics

10.1109/LED.2003.812572

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Bibliographic Details
Main Authors:	Yang, M.Y., Huang, C.H., Chin, A., Zhu, C., Li, M.F., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Capacitor Dielectric constant Frequency dependence High κ MIM RF
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82459
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82459
record_format	dspace
spelling	sg-nus-scholar.10635-824592023-10-29T22:39:43Z High-density MIM capacitors using AlTaOx dielectrics Yang, M.Y. Huang, C.H. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Capacitor Dielectric constant Frequency dependence High κ MIM RF 10.1109/LED.2003.812572 IEEE Electron Device Letters 24 5 306-308 EDLED 2014-10-07T04:29:38Z 2014-10-07T04:29:38Z 2003-05 Article Yang, M.Y., Huang, C.H., Chin, A., Zhu, C., Li, M.F., Kwong, D.-L. (2003-05). High-density MIM capacitors using AlTaOx dielectrics. IEEE Electron Device Letters 24 (5) : 306-308. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2003.812572 07413106 http://scholarbank.nus.edu.sg/handle/10635/82459 000184064600007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Capacitor Dielectric constant Frequency dependence High κ MIM RF
spellingShingle	Capacitor Dielectric constant Frequency dependence High κ MIM RF Yang, M.Y. Huang, C.H. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L. High-density MIM capacitors using AlTaOx dielectrics
description	10.1109/LED.2003.812572
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yang, M.Y. Huang, C.H. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L.
format	Article
author	Yang, M.Y. Huang, C.H. Chin, A. Zhu, C. Li, M.F. Kwong, D.-L.
author_sort	Yang, M.Y.
title	High-density MIM capacitors using AlTaOx dielectrics
title_short	High-density MIM capacitors using AlTaOx dielectrics
title_full	High-density MIM capacitors using AlTaOx dielectrics
title_fullStr	High-density MIM capacitors using AlTaOx dielectrics
title_full_unstemmed	High-density MIM capacitors using AlTaOx dielectrics
title_sort	high-density mim capacitors using altaox dielectrics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82459
_version_	1781784142124417024

High-density MIM capacitors using AlTaOx dielectrics

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