High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications

High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications

10.1109/LED.2005.851241

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Bibliographic Details
Main Authors: Chiang, K.C., Huang, C.C., Chin, A., Chen, W.J., McAlister, S.P., Chiu, H.F., Chen, J.-R., Chi, C.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Analog
Ir
ITRS
MIM
TiTaO
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82472
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/82472

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